JPH0163131U - - Google Patents
Info
- Publication number
- JPH0163131U JPH0163131U JP1987156797U JP15679787U JPH0163131U JP H0163131 U JPH0163131 U JP H0163131U JP 1987156797 U JP1987156797 U JP 1987156797U JP 15679787 U JP15679787 U JP 15679787U JP H0163131 U JPH0163131 U JP H0163131U
- Authority
- JP
- Japan
- Prior art keywords
- spinner head
- wafer
- pin
- pin support
- pins
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987156797U JPH0163131U (en]) | 1987-10-15 | 1987-10-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987156797U JPH0163131U (en]) | 1987-10-15 | 1987-10-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0163131U true JPH0163131U (en]) | 1989-04-24 |
Family
ID=31435662
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987156797U Pending JPH0163131U (en]) | 1987-10-15 | 1987-10-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0163131U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02278713A (ja) * | 1989-04-19 | 1990-11-15 | Tokyo Electron Ltd | レジスト処理装置 |
-
1987
- 1987-10-15 JP JP1987156797U patent/JPH0163131U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02278713A (ja) * | 1989-04-19 | 1990-11-15 | Tokyo Electron Ltd | レジスト処理装置 |